Search results for "laser cleaning"
showing 2 items of 2 documents
XPS and SIMS study of aluminium native oxide modifications induced by Q-switched Nd:YAG laser treatment
2006
Publié suite au congrès ECASIA: 11th European Conference on Applications of Surface and Interface Analysis, 25-30 September 2005, Vienna, Austria; International audience; During laser cleaning of aluminium in ambient atmosphere, modifications of the metal surface can be induced by transient thermal effects. This work aims to characterize the modification of the aluminium oxide layer on pure aluminium for a wide range of power per area using a Q-switched Nd :YAG (1064 nm) laser with two pulse durations, 10 and 180 ns. Experiments were carried out with single laser shots in ambient air at fluences (e.g. energy per area) below the ablation regime. For 10-ns pulses with fluences between 0.7 and…
Laser assisted particle removal from Silicon wafers
2023
We have studied the removal of submicrometer particles from silicon wafers by the steam laser cleaning (SLC) and dry laser cleaning (DLC) processes. These processes are currently being investigated as new promising cleaning technologies for complementing traditional methods in industrial applications. For SLC a thin liquid layer (e.g. a water-alcohol mixture) is condensed onto the substrate, and is subsequently evaporated by irradiating the surface with a short laser pulse. The DLC process, on the other hand, relies only on the laser pulse, without application of a vapor jet. Using well-characterized monodisperse polystyrene and silica particles as well as irregularly shaped alumina particl…